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ref: -0 tags: Moxon ceramic array electrode lithography date: 07-12-2012 23:05 gmt revision:3 [2] [1] [0] [head]

IEEE-1275580 (pdf) Ceramic-based Multisite Electrode array for Chronic Single-Neuron Recording

  • Their substrate is polished to 35-50um thick
  • patterned using standard lift-off lithographic techniques
  • four electrodes per shank
  • The ceramic is considerably stiffer than silicon (table) -- 372 Gpa vs. 190 Gpa.