m8ta
You are not authenticated, login.
text: sort by
tags: modified
type: chronology
{1322}
hide / / print
ref: -0 tags: polyimide silicon carbide adhesion DBS syle electrodes date: 07-22-2015 18:01 gmt revision:0 [head]

PMID-25571176 Fabrication and characterization of a high-resolution neural probe for stereoelectroencephalography and single neuron recording.

  • Layer stack:
    • 5um PI (UBE U-varnish S)
    • 50nm SiC
      • Deposited at 100C.
    • 300nm Pt
    • 30nm SiC
    • 10nm DLC
    • 5um PI
      • Cured at 450C
    • 100nm Al hard mask (removed)
    • Cytop dry adhesion layer
      • softbake to remove solvent,
      • then hardbake at 290C for 4 hours to anneal the PI and adhere the Cytop to it.