PMID-26627311 Monolithically Integrated μLEDs on Silicon Neural Probes for High-Resolution Optogenetic Studies in Behaving Animals.
- 12 uLEDs and 32 rec sites integrated into one probe.
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- InGaN monolithically integrated LEDs.
- Si has ~ 5x higher thermal conductivity than sapphire, allowing better heat dissipation.
- Use quantum-well epitaxial layers, 460nm emission, 5nm Ni / 5nm Au current injection w/ 75% transmittance @ design wavelength.
- Think the n/p GaN epitaxy is done by an outside company, NOVAGAN.
- Efficiency near 80% -- small LEDs have fewer defects!
- SiO2 + ALD Al2O3 passivation.
- 70um wide, 30um thick shanks.
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